Effect of process parameters on the growth and wear resistance of CrAlN coating on silicon nitride surface

Abstract

PurposePreparing CrAlN coatings on the surface of silicon nitride bearings can improve their service life in oil-free lubrication. This paper aims to match the optimal process parameters for preparing CrAlN coatings on silicon nitride surfaces, and reveal the microscopic mechanism of process parameter influence on coating wear resistance.Design/methodology/approachThis study used molecular dynamics to analyze how process parameters affected the nucleation density, micromorphology, densification and internal stress of CrAlN coatings. An orthogonal test method was used to examine how deposition time, substrate temperature, nitrogen-argon flow rate and sputtering power impacted the wear resistance of CrAlN coatings under dry friction conditions.FindingsNucleation density, micromorphology, densification and internal stress have a significant influence on the surface morphology and wear resistance of CrAlN coatings. The process parameters for better wear resistance of the CrAlN coatings were at a deposition time of 120 min, a substrate temperature of 573 K, a nitrogen-argon flow rate of 1:1 and a sputtering power of 160 W.Originality/valueSimulation analysis and experimental results of this paper can provide data to assist in setting process parameters for applying CrAlN coatings to silicon nitride bearings.