Abstract

Effect of pre-heating temperature on the properties of Lead zirconate titanate (PZT) powders and films was investigated. PZT powders and films were prepared via a triol-based sol–gel route. The PZT powders prepared at various heating temperatures were characterized. The preheating temperature range of 200°C–400°C and annealing temperature of 600°C were chosen to make the films. AFM micrograph revealed the thin films with homogeneous, dense, and crack-free properties. The pre-heating temperature was found to have a significant effect on phase formation, prefer orientation, and dielectric properties of the films. Higher dielectric constant and dielectric loss were observed at higher pre-heating temperature. However, all films showed the dielectric loss less than 0.04.

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