Abstract
Photoacoustic spectroscopy was used to measure the pulse duration dependence of the XeCl laser ablation of polyimide, polyethylene terephthalate, and post-mortem human aorta. It was observed that the ablation threshold exhibited only a weak dependence on pulse duration. Photoablation etch depth measurements of polyimide as a function of XeCl laser fluence indicated that over a practical etch depth range of 0.1 to 1 μm per laser pulse the etch depth was independent of the pulse duration.
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