Effect of nitrogen content on the properties of CrN xO yC z coating prepared by DC reactive magnetron sputtering

Abstract

The CrN x O y C z coatings were deposited by planar DC reactive magnetron sputtering onto AZ31 Mg alloy and high speed tool steel (HSTS) substrates at a substrate temperature of 200 °C. The effect of N 2 content on composition and structure of the CrN x O y C z coatings was investigated. The structure of the CrN x O y C z coatings was analyzed by a glancing angle X-ray diffraction (GXRD). The cross-section morphology and thickness of the CrN x O y C z coatings were checked by a field emission scanning electron microscope (FESEM), and the composition profile and chemical state were carried out by an X-ray photoelectron spectroscopy (XPS). The experimental results showed that the structure and phase composition of the CrN x O y C z coatings depended on N 2 content. The evolution of the structure of CrN x O y C z coatings was consistent with CrN x -based coatings, and the CrN x O y C z coatings contained Cr 2O 3, CrO 2, CrO, Cr 3C 2, CrN x (Cr, CrN, Cr 2N), as well as different chromium oxynitride. However, the carbide and oxynitride were oxidized after annealing.