Abstract

Nanoindentation tests with loading rates of 0.05 mN/s, 0.1 mN/s, 0.5 mN/s, and 1.0 mN/s were conducted on the Au ball bond. The effect of different loading on the Au ball bond were analysed based on qualitative and quantitative results. The displacement burst was more pronounced with the increment of loading rates. The increase of hardness value and the decrease of the reduced modulus value when the loading rate was increased are due to the effect of creep. It was found that the loading rate of 0.5 mN/s is the appropriate and stable value for the nanoindentation test on the Au ball bond.

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