Abstract
AbstractNitrogen gas phase doped diamond‐like carbon (DLC) coating on molybdenum‐tip field emitter arrays (FEAs) has been used to improve electron emission characteristics. The conventional plasma enhanced chemical vapor deposition (PECVD) method using a layer‐by‐layer technique was applied to deposit N‐doped hydrogen‐free DLC films. Electron emission characteristics were measured and possibility of applying this type of emitters to high frequency field emission displays (FEDs) was reported. The turn‐on voltage of Mo‐tip FEAs was decreased from 75V to 55V by DLC coating and emission current was more stable than that of conventional Mo‐tip FEAs. The transconductance of Mo‐tip FEAs was increased by N‐doped hydrogen‐free DLC coating with lowering effective work function of emitters.
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