Abstract
Nitrogen gas phase doped diamond-like carbon (DLC) coating on molybdenum-tip field emitter arrays (FEAs) has been used to improve electron emission characteristics. The conventional plasma enhanced chemical vapor deposition method using a layer-by-layer technique was applied to deposit N-doped hydrogen-free DLC films. Electron emission characteristics were measured and the possibility of applying these type of emitters to high frequency field emission displays was reported. The turn-on voltage of Mo-tip FEAs was decreased from 75 to 55 V by DLC coating and emission current was more stable than that of conventional Mo-tip FEAs. The transconductance of Mo-tip FEAs was increased by N-doped hydrogen-free DLC coating with lowering effective work function of emitters.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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