Abstract
SrTiO3 dielectric thin film capacitors using Pt single layer or Pt/Ru bilayer metal electrodes were prepared on various substrates by pulsed laser ablation. The work function and the surface roughness were evaluated for Pt metal electrodes. In addition, leakage currents and Schottky barrier heights were also characterized for the capacitors. The leakage current was suppressed and the Schottky barrier height enhanced by decreasing the surface roughness and increasing the work function of the metal electrodes. The work function of metal electrodes measured by photo-electron spectroscopy in air was increased by approximately 0.16 eV by decreasing surface roughness. Similar to the work function, the Schottky barrier heights were increased by approximately 0.20 eV. These results allow us to control leakage current behavior of thin film capacitors by tuning of the electrode microstructures.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
