Abstract
Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.
Highlights
Microbeam structures are extensively used in various sensors and actuators in electromagnetics, optics, and biology [1,2,3]
Since the geometric shape of microbeams significantly affects the sensitivity of mass microsensors, this paper addresses the effect of microbeam geometry on the frequency sensitivity of the microsensors
Since this paper examines the microbeams with geometric discontinuity, ABAQUS software was used for the vibrating analysis of the microbeams using the finite element method
Summary
Microbeam structures are extensively used in various sensors and actuators in electromagnetics, optics, and biology [1,2,3]. Loui et al [12] designed five different types of piezoelectric microbeams with different geometric shapes and concluded that microbeams with smaller geometric ratio are more suitable for the microsensor applications. These findings show that microbeams with smaller geometric ratio have higher rigidity and are more suitable for surface loading. Salehi Khojin et al [13] studied the vibrating behavior of piezoelectric microbeam as a mass sensor in the air environment They used the modal analysis method to solve the differential equation of motion of a piezoelectric microbeam with an added mass at one of its ends. The kinetic energy of the microbeam and the kinetic energy of the nanoparticle at any resonance frequency can be expressed as: T
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