Abstract
This study investigates the propagation characteristics of surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures using the finite element method. Propagation characteristics in AlN/thin metal film/diamond and AlN/diamond structures are also evaluated for comparison. Results indicate that by adding the Mo layer at the AlN/diamond interface, the maximum coupling coefficient can be upgraded to 2.24%, which is 5% and 81% higher than that of AlN/thin metal film/diamond and AlN/diamond structures, with a very high phase velocity of 10745 m/s. The effects of electrodes on surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures are also discussed.
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