Abstract
Wrinkles attract significant attention due to their ability to enhance the mechanical and optical characteristics of various optoelectronic devices. We report the effect of the plasma gas type, power, flow rate, and treatment time on the wrinkle features. When an optical adhesive was treated using a low-pressure plasma of oxygen, argon, and nitrogen, the oxygen and argon plasma generated wrinkles with the lowest and highest wavelengths, respectively. The increase in the power of the nitrogen and oxygen plasma increased the wavelengths and heights of the wrinkles; however, the increase in the power of the argon plasma increased the wavelengths and decreased the heights of the wrinkles. Argon molecules are heavier and smaller than nitrogen and oxygen molecules that have similar weights and sizes; moreover, the argon plasma comprises positive ions while the oxygen and nitrogen plasma comprise negative ions. This resulted in differences in the wrinkle features. It was concluded that a combination of different plasma gases could achieve exclusive control over either the wavelength or the height and allow a thorough analysis of the correlation between the wrinkle features and the characteristics of the electronic devices.
Highlights
Wrinkles are wavy physical structures with periodicity that can impart flexibility to optoelectronic devices and control the optical path through a material stack
Plasma treatment on the surface of a UV-curable polymer forms a rigid layer on top of the soft foundation
The argon molecules are heavier and smaller nitrogen and oxygen molecules of similar weights and sizes; the argon plasma comprises than the nitrogen and oxygen molecules of similar weights and sizes; the argon plasma positive ions, while the nitrogen and oxygen plasma comprise negative ions
Summary
Wrinkles are wavy physical structures with periodicity that can impart flexibility to optoelectronic devices and control the optical path through a material stack. Low-pressure plasma treatment can be utilized to achieve environmental control and reliability of the plasma properties and wrinkle features. Low-pressure plasma treatment allows the generation of plasma from various gases by blowing the desired types and amounts of gases into the vacuum chamber This allows a thorough analysis of the variation in the wrinkle features with the plasma characteristics such as the gas type, gas flow rate, power, and treatment time. The variation of the wrinkle wavelength with the elastic modulus of the material and its application to electronic devices were the primary subject of studies on wrinkle generation by low-pressure plasma treatment. We analyzed the variation in the wrinkle features with the parameters of low-pressure plasma treatment such as plasma gas type, plasma power, and treatment time, to enhance the control over wrinkle features and broaden the applications of wrinkle structures. These differences were attributed to the opposite charges of the argon ions (positive) and the nitrogen and oxygen ions (negative) in the plasma, along with the differences in the molecular sizes and weights
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