Abstract

Closed field unbalanced magnetron sputtering system (CFUBM) was employed to prepare graphite-like carbon (GLC) film during deposition process. Structure and morphology of GLC film were measured by Raman spectrum and atomic force microscopy (AFM). Friction and wear properties of GLC film in different test conditions (applied load, sliding frequency, aqueous environment) were evaluated through multifunctional tribometer. The morphology of wear track was investigated by optical microscopy. Results indicated that the GLC film owned vast amounts of sp2-bonding clusters and displayed a flat surface. By friction and wear test, the GLC film presented relatively low COF and wear rate. Meanwhile, the applied load, sliding frequency and aqueous environment were crucial factors to influence the friction and wear behaviors of GLC film. Combined with the Hertzian contact theory, the micro-meshing regime might rationally explain the tribological mechanism of GLC film in this work.

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