Abstract
Graphitized structures are fabricated on the polycrystalline diamond surface using an excimer KrF (λ = 248 nm, τ = 20 ns) and a Ti:Al2O3 (λ = 400 nm, τ = 120 fs) lasers. It is shown that the conductivity of formed structures is independent of the energy density and the number of pulses per surface point in the case of the excimer laser, whereas such a dependence was observed for femtosecond pulses. The causes of the dependence of the conductivity of surface structures on laser irradiation parameters are discussed.
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