Abstract
In this paper, The InxAl1-xAs graded buffer was inserted between the InAlAs buffer layer and the pseudomorphic In0.66Ga0.34As channel layer to improve material quality in channel. The results show that the InxAl1-xAs graded buffer layer with 50 nm thickness can obtain a good heterojunction interface and the root mean square (RMS) of 0.154 nm. The two dimensional electron gas (2-deg) mobility and concentration were 8570 cm2/Vs. and 2.7 cm−2 × 1012 cm−2 at 300K, respectively. InxAl1-xAs graded buffer layer can enhance the interface quality and the electrical performance through releasing the interface strain caused by pseudomorphic In0.52Al0.48As/In0.66Ga0.34As HEMT. This study shows great potentials by incorporating InxAl1-xAs graded buffer layer in pseudomorphic InP HEMT materials to improve the properties of devices.
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