Abstract
This article analyzes the interactive damping effect on the sensitivity of flexural and torsional vibration modes of a V-shaped atomic force microscope (AFM) cantilever. The interaction of the cantilever with the sample surface is modeled by a combination of a spring parallel to a dashpot in the normal direction and a similar combination in the lateral direction. An approximate form for the sensitivities of both modes was derived based on the method of Rayleigh–Ritz. Using the approximate formula, predictions of modal sensitivity may be made to design cantilevers with optimum sensitivity for specified uses. The results show that the effect of interactive damping is significant and should not be disregarded in the design of V-shaped AFM cantilevers. Interactive damping decreases the sensitivities of both flexural and torsional vibration modes when the contact stiffness is low.
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