Abstract
Homoepitaxial diamond (100) and (111) films were grown side by side in a hot filament reactor at 875 °C with and without oxygen. The growth rates and surface morphologies were monitored by in situ Fizeau interferometry and atomic force microscopy, respectively. Penetration twins were observed on the (100) surface at a low (100)-to-(111) growth-rate ratio but not at a high value, as expected. Surprisingly, penetration twins were not observed on the (111) surfaces, which were dominated by contact twins in both cases. Implications of these results for microstructural control of diamond films and the effect of oxygen additions are discussed.
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