Abstract
The scope of this paper is experimental and numerical analysis of micromembranes supported by bent beam hinges fabricated from gold in different geometrical dimensions. The experimental tests are performed using an atomic force microscope in order to determine the micromembrane behaviour under a mechanical force. One of the main application of movable microcomponents is MEMS switching application where the flexible plate is directly deflected to substrate in order to close a circuit. Adhesion between the mobile plate and substrate depends on the roughness of the contact surfaces and is influenced by the micromembrane stiffness based on the restoring force. As the dimensions of hinges increases, the stiffness of micromembrane increases and the adhesion between mobile plate and substrate decreases, respectively.
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