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Abstract
A two-mask fabrication process of a four-level Fresnel lens was used to evaluate its characteristics through investigating the effect of SU-8 photoresist on the profile of the focusing lens. A two-step deposition of ZnO films was applied to develop a feasible fabrication of a piezoelectric transducer with the structure Al/ZnO/Pt/Ti/SiO2/Si under reasonable conditions, which include deposition pressure of 0.7 Pa and 1.3 Pa, RF power of 100 W and 178 W, and sputtering gas ratio Ar:O2 = 1:3 and 1:1 for first and second step deposition, respectively. Highly c-axis textured ZnO films were successfully obtained through two-step deposition process.
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