Effect of Electron Irradiation on 1700V 4H-SiC MOSFET Characteristics

Abstract

The effect of 4.5 MeV electron irradiation on static characteristics of commercially available 5 A/1700 V SiC power MOSFETs is investigated. Results show that in the low dose range (up to 20 kGy) the threshold voltage decreases rapidly with irradiation dose but devices keep full functionality. This effect is caused by embedding of the positive charge into the gate oxide. When electron dose reaches 200 kGy, the threshold voltage moves back close to its original value, however, the ON‑state resistivity increases and transconductance is lowered. This is caused by introduction of deep acceptor centers into the low doped drift region of MOSFET. This effect can be considered as a cause of the final failure of the device (the lost of the ON-state capability).