Abstract

AbstractThin films of various thicknesses in the MIM structure have been prepared from the the powders of SnO2, Sb2O3 and (SnO2 + Sb2O3) of high purity by the thermal evaporation technique in a vacuum of 10−5 Torr. Dielectric properties of SnO2, Sb2O3, and their mixed thin films have been studied with ac and dc electric fields and frequency. Capacitance and loss tangent are almost independent on dc voltage upto 1.0 V for SnO2, 10.0 V for Sb2O3 and 2.5 V for mixed films. These capacitors become unstable at 1.0 V for SnO2 films and 2.5 V for mixed films. For higher film thicknesses the decay in these films starts at higher voltages. Capacitance and loss tangent increases with applied ac voltage in SnO2, Sb2O3, and their mixed films. A comparison of the capacitance values of SnO2, Sb2O3, and their mixed films showed that the capacitance values are less in Sb2O3 as compared to SnO2 films. In mixed films the capacitance is greater than the constituent films. These studies have shown that Sb2O3 films are found to be more stable compared to SnO2 and their mixed films for ac and dc voltages. The results thus obtained on SnO2, Sb2O3, and their films are presented and discussed.

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