Abstract
The PST thin films with different top electrodes were prepared by magnetron sputtering and Sol-gel, respectively. The effects of different top electrodes on Dielectric and Tunable Properties of the films were studied. It is found that the comprehensive properties of the PST films can be improved by using suitable top electrodes. When the dielectric tuning amount of PST thin films using Au/Cr dielectric tuning value is 71.4%, the dielectric loss is 0.02004, and the figure of merit (FOM) is 35.7, which has optimal dielectric properties. At the same time, the purpose of replacing precious metals (Au) with cheap metals (Cu) is realized.
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