Effect of dielectric barrier discharge on ceramic surface properties

Abstract

Ceramics, as a commonly used insulating and thermally conductive material, has a wide range of applications in the field of micro-nano manufacturing. In recent years, research on ceramic bonding has also increased. However, ceramic bonding has some problems such as bonding failure and low bonding quality. Learning from other commonly used bonding materials, the important factor for the success of bonding is the surface properties of the material. Therefore, in this study, the surface of ceramic was treated by dielectric barrier discharge (DBD) to improve surface properties. The effects of dielectric barrier discharge on the surface properties of ceramic is investigated from the three aspects: hydrophilic angle, surface energy and surface morphology. In the dielectric barrier discharge experiment, blind via glass is used as the blocking medium for the upper electrode. The lower electrode is covered by ceramic, and the ceramic is also the material to be treated. The influence of processing time, discharge voltage and discharge frequency on the treatment effect is investigated in the experiment. The hydrophilic angle and surface energy of the treated ceramics are measured and calculated by contact angle measuring instrument, and the surface morphology was observed by scanning electron microscopy. The results show that the longer the discharge treatment time is, the larger the discharge output voltage is, the smaller the discharge gap is, the faster the hydrophilicity of the surface of the ceramic sheet is, and the higher the activation energy is. The damage of the ceramic surface after treatment is small, and the impurities on the surface are destroyed. In general, the surface properties of ceramics after dielectric barrier discharge treatment are better than before.