Abstract
The stability of the physicochemical properties of the (0001) plane of sapphire is largely determined by the accuracy of its orientation. It is shown that at a deviation of the surface from the (0001) plane by 4°, the wear rate increases by 13–22%, the corrosion resistance decreases by a factor of 1.4, thus enabling the rate of chemical mechanical polishing to grow up to 2.3 times.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
