Abstract
In this study, we fabricated electrolyte-dielectricmetal(EDM) device incorporating a high-k Al2O3 sensing membrane through porous anodic aluminum oxide (AAO) by two step anodizing process for pH detection. To change the characters of the AAO template, the crystallizing time was varied from 0 hour to 10 hours at 600 o C. The structural properties were observed by field emission scanning electron microscopy (FE-SEM). The pH sensitivity increased in the crystallizing time from 0 hour to 2 hours and gradually saturated at 5 hours or more. The porous AAO sensor with the crystallizing temperature of 10 hours showed the good sensitivity and long-term stability were 54.1 mV/pH, 2.4mV/h, respectively.
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