Effect of copper content on the microstructure, morphology, and optical properties of ZrSiN coatings deposited using pulsed-direct current reactive magnetron sputtering

Abstract

The incorporation of an element such as silicon, silver, or copper, etc. into transition metal nitrides has allowed the production of multifunctional materials. These materials exhibit distinct properties contributed by each phase, thereby enhancing the industrial application of metal nitrides. This study focuses on the deposition of ZrSiNCu coatings using pulsed-DC reactive magnetron sputtering, aiming to investigate the influence of copper on the chemical composition, morphology, microstructure, and optical behavior of the coatings. The results showed that the deposited coatings were nanostructured, with a mixture of ZrN, ZrO2, and nanocrystalline Cu, which had a profound impact on the Cu segregation on the surface and columnar boundary due to the fact that copper is relatively inert with respect to a ceramic matrix. Furthermore, an increase in the Cu content led to the presence of large aggregates on the surface and lower bandgaps.