Abstract
Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLC films. By optical emission spectroscopy and ion probe, the composite species of laser generated plasma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laser energy density, and the distance from the target are investigated. The relation of the properties of deposited films with the plasma characteristics is studied.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
