Effect of buried extended defects on the radiation tolerance of ZnO

Abstract

Interaction between defects of different types often determines their evolution in semiconductors under ion irradiation. Here, we investigate the role of buried pre-existing extended defects in the damage accumulation in ZnO single crystals implanted at room temperature and at 15 K with 80 keV N ions. For the room temperature implants but not for the 15 K ones, the defect accumulation around the projected range is strongly suppressed while a pronounced build-up occurs in the region of the pre-existing defects. This is attributed to thermally activated migration of point defects from the implanted volume and subsequent trapping/annihilation by the pre-existing defects. The obtained results imply that a defect engineering scheme involving formation of a high density of extended defects outside the active volume of a ZnO-based device could be beneficial to enhance the radiation tolerance.