Abstract
PbZrO3 (PZ) antiferroelectric films and PbZr0·52Ti0·48O3 (PZT) ferroelectric films are widely researched due to their significance as representative film materials. The article investigates the structure-performance relationship of PZT/PZ composite films with different PZ and PZT phase structures. PZT/PZ films with different PZ and PZT phase structures were fabricated on SiO2/Si substrates using the sol-gel method. The electrical properties of prepared films annealed at different temperatures were characterized and were compared at different annealing temperatures (550 °C, 600 °C, 620 °C, 650 °C). At the annealing temperature of 600 °C, it was observed that the presence of pyrochlore and perovskite phases in PZ makes the composite films high breakdown field strength (BDS) and moderate polarization (Pm), enhancing the energy storage properties. However, when the annealing temperature exceeds 600 °C, it would have the opposite effect on the BDS and Pm due to the increased pyrochlore and perovskite phase. The above analysis indicates that regulating the phase structure of PZ and PZT films is the effective approach to obtain high energy storage density capacitors.
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