Abstract
Polycrystalline piezoelectric lead-free 85mol% (Bi0.5Na0.5)TiO3–10mol% (Bi0.5K0.5)TiO3–5mol% BaTiO3 (85BNT–10BKT–5BT) thin films were fabricated at different annealing temperatures by a chemical solution deposition method on Pt/Ti/SiO2/Si substrates. Perovskite phase was achieved during annealing at 650–800°C. The effect of annealing temperature on piezoelectric and mechanical properties was investigated. The results show that 85BNT–10BKT–5BT thin films annealed at 700°C exhibit the largest effective d33 value of 140.4pm/V, and the highest elastic modulus 142.0GPa. The optimal properties can be attributed to dense domain and homogenous microstructure. Results show that 85BNT–10BKT–5BT thin films may be a good candidate for lead-free piezoelectric-based micro-electromechanical systems.
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