Abstract

We have already reported Fe-Ni films with good soft magnetic properties prepared by using an electroplating method. In the present study, we employed an annealing for further improvement in soft magnetic properties of the electroplated Fe-Ni films. The annealing reduces the coercivity of the films, and the reduction rate of the coercivity depended on the Cl- ion concentration in the bath. The Fe22Ni78 films prepared in the plating bath with high Cl- ion concentration showed large reduction rate of the coercivity, and we found that the annealing is more effective for high Cl- ion concentration bath since much lower coercivity value can be obtained compared with that for low Cl- ion concentration one.

Highlights

  • Fe-Ni films have been applied to magnetic cores of fluxgate sensors,[1,2] and an electroplating method is one of effective methods to obtain soft magnetic films due to the high economic viability of the process

  • We reported Fe-Ni films with good soft magnetic properties prepared by an electroplating method,[3] and many researchers reported electroplated Fe-Ni soft magnetic films.[4,5,6,7,8]

  • We have reported the effect of Cl- ion concentration in plating baths, and confirm that moderate low Cl- concentration is preferred for obtaining the Fe22Ni78 films with good soft magnetic properties.[9]

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Summary

Introduction

Fe-Ni films have been applied to magnetic cores of fluxgate sensors,[1,2] and an electroplating method is one of effective methods to obtain soft magnetic films due to the high economic viability of the process. We have reported the effect of Cl- ion concentration in plating baths, and confirm that moderate low Cl- concentration is preferred for obtaining the Fe22Ni78 films with good soft magnetic properties.[9] In electroplating of Ni film, Watts-type plating baths are widely used, and the baths contain a small amount of Cl- ions to enhance Ni anode corrosion and prevent anode passivation. It is well-understood that high Cl- ion concentration in the Watts-type baths increases tensile stress in as-plated Ni films. We investigated an improvement in soft magnetic properties of the electroplated Fe-Ni films using an annealing, considering Cl- ion concentration in plating baths

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