Abstract
The interactions between silicon substrate and abrasive particles are the important mechanical process during nano-grinding. We conducted the molecular dynamics simulations to explore the influence of the different abrasive particle shapes —the common as-synthesized diamond shapes (cubic, cubo-octahedral, and octahedral) —on the macro real-time observables, including grinding force, temperature, roughness, subsurface damage, material removal rate, and XRD spectra, from the atom-level insight. The results show that the different shapes might produce a different effect during the nano-grinding. According to the required demand, the different particle shapes could tend to be considered. For example, the cubo-octahedral was suitable for the rough nano-grinding; the octahedral was suitable for the finish nano-grinding. The results of this study might provide an atom-level optimal strategy.
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