Abstract
Electrodeposited nickel–iron is used as a functional layer in inductively working micromagnetometers. The magnetic properties of this layer, which builds up the flux guiding core structure of helical copper coils, have a crucial influence on the operation of the sensors. Low coercitive field strengths and high magnetic saturation flux densities of the ferromagnetic cores are required for excellent sensor characteristics. In this paper we present an innovative magnetic treatment below Curie-temperature of electrodeposited nickel–iron as well as an effect analysis of the MEMS fabrication process regarding the options of seed layers for electrodeposition.
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