Abstract
An electron cyclotron resonance (ECR) plasma is produced with a slotted Lisitano coil, and the axial distribution of the plasma parameters is measured in detail for different magnetic field configurations. It is found that the plasma density in uniform magnetic fields axially decreases more slowly than that in divergent magnetic fields. Furthermore, carbon films are formed by ECR plasma chemical vapor deposition (CVD), and the deposition rate obtained in the uniform magnetic fields is found to be larger than that obtained in the divergent magnetic fields.
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