Eco‐friendly glass wet etching for MEMS application: A review

Abstract

AbstractGlass is one of the most essential materials in various industrial fields. A representative application is as interposers in the semiconductor and display industries and microfluidic devices in the bio‐industry. Due to technological advancements, electric devices and various products are becoming lighter and smaller. Consequently, precision processing of the substrate is becoming increasingly important. One significant leading technology among these is through glass via (TGV) technology, which is attracting attention as a future alternative to through silicon via. In particular, TGV should be capable of microfabrication with a large aspect ratio and a consistent small hole size. TGV is typically fabricated using a wet etching process, so wet etching technology is a prominent focus in microfabrication. However, glass has isotropic properties, making achieving a high aspect ratio difficult. Traditionally, research on the wet etching method using hydrofluoric acid (HF) has been conducted. Nevertheless, HF etching has several disadvantages, including air pollution and human harm. Additional studies have been performed to address these issues. This review paper will cover the conventional HF‐based wet etching method and alternative HF etching processes (eco‐friendly materials). This technology would significantly help overcome the traditional problems associated with HF etching and fabricating precision‐processed glass in the semiconductor, display, and bio‐device industries.