Abstract
AbstractOnly after annealing, EBIC investigations on epitaxial layer defects partly gave contrasts. More information on the crystallographic structure of these defects was obtained in subsequent HVEM investigations. Experimental results confirmed the supposition that only the decoration of the crystallographic defects with additional recombination centres (impurity atoms), and not existence of the defects themselves, results in a detectable EBIC contrast. The observed getter efficiency of the various defect types is discussed. This efficiency is growing with increasing lattice distortion.
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