Abstract
AlGaN-based ultraviolet (UV) light sources have recently attracted much research interest due to their potential candidate to replace excimer and mercury lamps. However, their output power is limited by the inefficient p-type doping at high Al composition AlGaN. In this talk, we will report on the electron-beam-pumped UV light sources, where multiple ultrathinGaN wells are used to enhance the internal quantum efficiency and to reach deep UV range such as 230 nm. And UV light source with wavelength varing from 285-232 nm with corresponded output power of 23-160 mW have been achieved under pulse mode.
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