Abstract
The static and the dynamic behaviours of a MEMS subjected to thermoelastic and squeeze film effects have been investigated. Major attention is initially devoted to the modeling of this multi-physics system, including mechanical, electrical, thermoelastic and fluid dynamics behaviours, and their couplings. Then, static solutions have been obtained numerically by a finite-difference technique. Finally, an analysis of the vibrations is performed, and the complex natural frequencies are determined. The real part is related to the oscillatory behaviour, while the imaginary part provides the overall damping of the system.
Highlights
The analysis of the linear and nonlinear dynamics of Micro- and Nano-Electrical-Mechanical-Systems have been largely investigated in the recent past [1] due to the increasing interest toward this particular class of dynamical systems.The practical importance arises from a variety of applications in challenging areas of research and development, where using MEMS enables very smart solutions unavailable with other technologies
Major attention is initially devoted to the modeling of this multi-physics system, including mechanical, electrical, thermoelastic and fluid dynamics behaviours, and their couplings
From a theoretical point of view, on the other hand, the interest in focused on modeling [6,7,8,9] and on the analysis of the response [10, 11]. In the latter case the goal is often that of accurately determining [12] and controlling [13] the static and the dynamic pull-in threshold, which could or could not be an unwanted phenomenon depending on the application at hand, and in fully understanding the overall dynamical behaviour in order to improve the performances of the system [1]
Summary
The analysis of the linear and nonlinear dynamics of Micro- and Nano-Electrical-Mechanical-Systems (commonly known as NEMS and MEMS, respectively) have been largely investigated in the recent past [1] due to the increasing interest toward this particular class of dynamical systems. From a theoretical point of view, on the other hand, the interest in focused on modeling [6,7,8,9] and on the analysis of the response [10, 11] In the latter case the goal is often that of accurately determining [12] and controlling [13] the static and the dynamic pull-in threshold, which could or could not be an unwanted phenomenon depending on the application at hand, and in fully understanding the overall dynamical behaviour in order to improve the performances of the system [1]. They have been repeatedly analyzed [1], to the best of our knowledge they have been never considered jointly, both in modeling and in simulations, a fact that constitutes the main goal of this paper, which is a first report of a more general work which is still in progress
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
