Abstract
We present a dynamical flow sensor for the condition monitoring of hydraulic systems using a micro flow sensor from polymer. The micro flow sensor is based on the thermal anemometric principle. A thin Polyimide membrane is used as a support for 3 gold track structures forming a heater and two resistive thermometers. When inserted into the hydraulic pipe only a small bypass flow is directed through the fluidic channel of the sensor by means of a special splitting system. Due to its small heat capacity the flow sensor is suitable to detect flow pulsations up to about 1000 Hz.
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