Abstract

Dynamic thermal mechanical properties of Epoclad negative photoresist have been studied. These experiments are part of the mechanical characterization of several photo definable polymers which can be used as a permanent, active and, or structural layer in a MEMS. This paper reports on the visco-elastic properties such as the loss modulus, the storage modulus and the glass transition temperature.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.