Abstract
The time-dependent charging process of an insulating specimen under electron beam irradiation is calculated by taking into account the charge continuity equation, the Poisson equation, Ohm's law and the electron-beam-induced conductivity. The energy and the charge deposition distributions are calculated by the Monte Carlo simulation of electron trajectories taking into account the electric field distribution in the specimen. The time-dependent charge and potential distributions are obtained in the present calculation. As the electron beam energy is 10 keV and the specimen is a 1-mm-thick poly-methyl-methacrylate (PMMA) wafer, the surface potential increases to a positive value at first, and then becomes a negative one. This charging process agrees with experimental findings.
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