Abstract
Offering high sensitivity, depth profiling and ion imaging capabilities together with high throughput, dynamic secondary ion mass spectrometry (SIMS) proves extremely useful for a wide range of nuclear science applications. The CAMECA IMS 7f/7f-Auto is a versatile magnetic sector SIMS well suited for such applications. In this work, various examples of material analyses that are of interest for nuclear science are presented: depth profiling of the xenon and mapping of contaminants in CeO2, in-depth distribution of iodine in SiC using the energy filtering technique for improving the I detection limit, and depth profiling analysis of molybdenum in UO2 using eucentric sample rotation for minimizing surface roughness development (thus improving data quality).
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More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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