Abstract

In this paper, we characterize the signature of traps existing in the new AlGaN/GaN HEMT of 0.15-μm ultrashort gate length and 8 × 50 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> gate width (GH15) through three different measurement techniques which are low frequency (LF) S-parameters, drain-current deep level transient spectroscopy (I-DLTS), and LF drain noise characterization. These three different measurements techniques were performed for varying chuck temperatures (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">chuck</sub> ) ranging between 25 °C and 125 °C and for the same biasing condition. All measurements ensure approximatively the extraction of the same signature of traps [apparent activation energy (E <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">a</sub> ) and cross section (σ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</sub> )] existing in the UMS device. Furthermore, we have characterized the thermal resistance (R <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TH</sub> ) using pulsed I-V measurement and a two-step calibration process. The determination of R <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TH</sub> is important to evaluate the device and to know precisely the signature of traps E <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">a</sub> and σ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</sub> defined by the Arrhenius equation. A large signal measurements using an unequally spaced multitone (USMT) signal were done in order to evaluate the performance of GH15 transistor around the optimum load impedance in terms of efficiency (max PAE ~ 55%). The leakage current which measured before and after all measurements for V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">GS</sub> = -6, -7 V and for V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS</sub> varying from 0 to 10 V was lower than 100 μA/mm. To our knowledge, results on charge-trapping and large-signal performance are reported for the first time in 0.15-μm technology.

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