Dynamic Fizeau interferometer for vibration optical measurement

Abstract

It is difficult for Fizeau interferometer to take its common optical path characteristics and anti-vibration measurement requirements into account. In this paper, a dynamic Fizeau interferometer (DFI) is proposed for anti-vibration optical measurement, and the advantages of common optical path and high accuracy of Fizeau interferometer are retained. DFI is divided into conventional Fizeau interferometer and vibration measurement part. An assistant mirror is added to the vibration measurement part to separate the information of the reference wavefront and the test wavefront with the shortcoherence laser. The vibration information of the Fizeau cavity is obtained by measuring the vibration of each surface separately. The vibration coefficients of the reference wavefront and the test wavefront are extracted by the algorithm, and then combined with the interferograms of the Fizeau interference part. The phase to be measured is finally recovered. DFI provides a solution for anti-vibration measurement of Fizeau interferometry, which has high application value in optical measurement.