Abstract
For a conventional Fizeau interferometer, accommodating both anti-vibration and conventional measurement modes is a challenge. Here, a dual-mode Fizeau interferometer (DFI) for dynamic optical measurement is proposed, which retains the conventional measurement mode. A vibration information measurement system is added to the conventional Fizeau interferometer for vibration-phase extraction. To better extract the vibration phase, a four-step phase-tilting iteration algorithm is proposed. The two combined systems separate the vibration information while retaining the Fizeau interferometry accuracy. Simulations and experiments prove that the two DFI modes both can accurately recover the phase. Thus, the DFI has considerable application potential for optical topography measurement.
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