Dynamic contour error compensation in micro/nano machining of hardened steel by applying elliptical vibration sculpturing method

Abstract

In this study, a novel dynamic contour error compensation technique has been proposed for the elliptical vibration cutting process achieved through the ultra-precision amplitude control. The influence of the contour error, triggered due to the inertial vibrations of the friction-less feed drive system, on the machining accuracy deterioration has been experimentally investigated. In order to reduce the contour error, a compensation method utilizing a real-time amplitude control in the elliptical vibration cutting process has been applied. In the proposed method, the dynamic motion error along the depth of cut direction is detected by utilizing the precise linear encoders installed on the feed drive system. The motion error in real-time is subsequently converted into cancelling amplitude command for the vibration control system of the ultrasonic vibrator, thus, guaranteeing that the envelope of the vibration amplitudes auto-tracks the dynamic reference position of the motion axis in the depth of cut direction. Due to this, a constant nominal depth of cut can be obtained even though the inertial vibrations disturb the feed drive control during machining. A series of experimental investigations have been conducted in order to analyze the machining performance by employing the proposed method. The maximum machining error is observed to significantly decrease from 0.6 to 0.04 μm by applying the proposed compensation method. Finally, the micro dimple array with a structural height from about 200 to 600 nm could be accurately fabricated with a maximum machining error of 36.8 nm, which verified the feasibility of the proposed amplitude control compensation method.