Dynamic Error Compensation of Coordinate Measuring Machines for High-Speed Measurement

Abstract

Owing to the demand for shorter cycle times for measurement tasks, coordinate measuring machines (CMM) are required to be used at high speeds. In such high-speed measuring processes, dynamic errors will have a greater influence on the accuracy, and so the dynamic error states should be analysed in this case. A dynamic error assessment model is established in this paper for a specific CMM. The major deflections at the probe position owing to accelerations are obtained by using finite-element analysis and error-data-fitting polynomials for three coordinates. The dynamic rotation errors of the CMM at the probe position are measured with a laser interferometer. By comparing the results of the measured dynamic errors using the laser interferometer and the ones obtained by the error-fitting polynomials, it is shown that dynamic error compensation for a specific CMM is possible to a certain degree.