Abstract
Ti-Ni shape memory thin films are expected to be applied for microactuators due to the great advantages such as large shape recovery force and strain. In this study, a Ti-Ni thin film was deposited on a Si substrate with SiO2 surface by using the radio-frequency (R.F.) magnetron sputtering method. A diaphragm microactuator was fabricated by applying the well-known Si photoetching method, and a heat-treatment was carried out in order to acquire shape memory effect. The dimension of the diaphragm was a square with the side of 560 μm, and the shape was convex in the martensite phase and flat in the parent phase. The shape changed repeatedly by thermal cycles of heating and cooling. In order to evaluate the dynamic characteristics of the diaphragm microactuator, three-dimensional shape analysis was carried out in terms of frequency, currents, and duty ratio. It is concluded that the dynamic properties of the Ti-Ni diaphragm are affected by the amplitude and frequency of electric current and heat transfer of atmospheric gas.
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