Abstract

Properties of theDX centers in Al0.5Ga0.5As bulk alloy (b-AL), (AlAs)2 (GaSa)2 ordered superlattice (o-SL) and (AlAs) m (GaAs) n disordered superlattice (d-SL) (m = 1, 2, 3,n = 1, 2, 3) with the same macroscopic composition were measured and compared. By deconvolution of deep level transient spectroscopy (DLTS) spectrum due to theDX center, we have found a decrease in the number of separate peaks in DLTS spectrum in an intentionally atomic ordered arrangement.

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