Abstract
Hydrophobic fluorocarbon polymer films have been used as anti-sticking and releasing coatings for templates in nano-imprint lithography, but have poor durability against repeated high pressure pressing processes. The addition of nitrogen into fluorocarbon-based gas plasma can provide nitrided fluorocarbon polymer films, as confirmed by Fourier-transform infrared spectroscopy. Fluorocarbon and nitrided fluorocarbon films have almost the same 110.0° contact angle with water drops. The nitrided fluorocarbon films are harder and significantly enhance durability as anti-sticking layers. Durability enhancement has been confirmed by fabricating replicas with silicon templates using nitrided fluorocarbon anti-sticking layers.
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