Dual-Material Double-Layer Gate Stack SON MOSFET: A Novel Architecture for Enhanced Analog Performance—Part II: Impact of Gate-Dielectric Material Engineering

Abstract

Part I of this paper dealt with the simulation study, using ATLAS 2D, of analog-circuit performance metrics for the dual-material-gate (DMG) silicon-on-nothing (SON) MOSFET. It was reported that, out of the several combinations in the DMG design studied, the DMG device with L <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">M1</sub> / L ratio as 1/2 amalgamates the advantages of using a high metal work-function gate M1 and low metal work-function gate M2 in the most efficient manner. This paper focuses upon the effect of double-layer gate stack (DGS) (high-k/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) on the single-material-gate (SMG) SON and the DMG SON MOSFETs. Improved Early voltage and reduced output conductance of the DMG SON MOSFETs are the driving forces behind the observed increase in intrinsic gain and f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> -gain relationship for the DMG devices over SMG SON MOSFETs, with the DMG SON MOSFETs having L <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">M1</sub> /L ratio as 1/2, proving to be the best choice among various L <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">M1</sub> /L ratios studied. A further improvement in intrinsic gain in DMG DGS SON MOSFETs comes about because of increased gate control on the channel, thus establishing design guidelines aiming at higher gain and better f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> -gain relationship.